POWER: SUPPLY
• Excellent load and line regulation: the HRF15 features load and line regulation of 0.001%. This precise regulation ensures that the output voltage remains highly stable despite fluctuations in the input voltage or changes in the applied load • Compact form factor: the series offers positive and negative 10, 12, and 15kV outputs in a compact package measuring 162.6 x 72.4 x 33mm (6.40 x 2.85 x 1.30”). This small size helps meet demanding size constraints in modern inspection systems without sacrificing performance. Compared to some competitor products, it offers higher stability in a significantly smaller package, less than half the volume in some cases • Programmability and monitoring: the HRF provides 0 to 100% programmable output voltage and current via an Analogue DC Voltage Programming Input (Vpgm). It also includes output voltage and current monitoring. Advanced features like these are important for supporting modern inspection systems, enabling easy integration into next-generation systems, and aiding in maintaining uptime in high-volume manufacturing environments. Digital communication is also available Applications within SEMs and beyond Within an SEM, high voltage power supplies like the HRF15 can be used in multiple locations. One key application is powering the electrostatic lenses. These lenses control the direction of the electron beam, moving it from left to right or right to left, depending on the required scan pattern. The current requirement depends on factors such as the number of lenses powered and the amount of deflection required. While a single beam is common, multi-beam inspection systems, which use hundreds or thousands of beams, also
require high-performance power supplies, sometimes with even stricter specifications. While the focus here is on SEM, the HRF15 series is also well-suited for other applications with similar critical requirements for stability, low noise, and precision. These include mass spectrometry, e-beam/ion beam applications, capillary electrophoresis, high voltage bias, and powering detectors in analytical and medical equipment. Mass spectrometry, in particular, shares very similar requirements to SEM, such as stability over time and low ripple/noise. Conclusion The performance of an SEM is fundamentally linked to the quality of its high-voltage power supply. Requirements for ultra-low ripple, noise, and drift, combined with high-stability over time and temperature, are not merely desirable features but critical necessities for accurate imaging, reliable defect detection, and consistent process control in demanding environments like semiconductor fabs. The HRF15 series is designed to meet these stringent demands, offering specifications like <0.001% ripple, 10 ppm/hr stability, <25 ppm/°C temperature coefficient, and <0.001% load/line regulation. These technical characteristics, combined with a compact form factor, 0-100% programmability, and robust protection features, position it as a suitable high-performance solution for powering critical components in SEMs and other noise-sensitive analytical instruments. The demanding size constraints in modern inspection systems also require compact power supply form factors that do not sacrifice performance.
43 ELECTRONICSPECIFIER.COM
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